1.0 纯度Purity (wt%)
SiAl≥99.9
2.0 组份 Chemical Composition (wt%) Al 10.0±2.0; 5.0±0.5; 8.0±1.5
Si Matrix
其他组份根据要求
Other upon request
3.0 金属杂质Metallic Element Content (ppm)
元素Element |
含量Content |
元素Element |
含量Content |
Fe |
≤800 |
Cu |
≤500 |
Ni |
≤300 |
Ca |
≤200 |
Cr |
≤200 |
Total |
≤1000 |
4.0 气体含量 Gas content (ppm)
元素Element |
含量Content |
元素Element |
含量Content |
O |
≤5000 |
N |
≤1000 |
5.0 物理性能Physical Prosperities
外观Appearance |
灰色 Gray |
表面洁净无肉眼可见裂痕The target surface clean without eye visible crack |
密度Relative Density (Min.) |
≥95% (Si90Al10 理论密度Theoretical Density2.36g/cm3 for Si90Al10) |
粗糙度Surface Quality (Ra) |
≤3.2μm |
孔洞或杂质
Pososity or Inclusions |
孔洞或杂质颗粒直径不大于 0.5mm。旋转靶表面宽度为 10mm 的环形区域内直径(0.1~0.5)mm 的孔洞或杂质颗粒不多于 5 个
Voids or inclusions not larger than 0.5mm; Voids or inclusions of 0.1~0.5mm
not more than 5 in a 10mm annular ring |
靶材尺寸Dimension (mm) |
按图纸要求加工According to the drawing |
内部质量 Internal Quality |
靶材内部无夹杂,无孔径大于 2mm 的孔洞
Voids or inclusions larger than 2mm is not acceptable in the target | |